AS ISO 14237-2006

Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

Standards Australia , 10/20/2006

Publisher: AS

File Format: PDF

$31.00$62.70

Description

Standard By:Standards Australia , 10/20/2006

Published:10/20/2006

Pages:22

ISBN(s):0733777929

File Size:1 file , 690 KB

Language:English

Note:This product is unavailable in Ukraine, Russia, Belarus

Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.

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