CGA G-14

Because of its widespread use and its potential for mishandling, this publication has been written and is intended for suppliers, distributors, and users of nitrogen trifluoride and its handling equipment. This publication provides a description of the potential hazards involved in handling nitrogen trifluoride and the guidelines to be taken to minimize risk potential.

The manufacture, purification, and analysis of nitrogen trifluoride are beyond the scope of this publication, although the general guidance given is also relevant to these processes.

Appendix A of this publication is an audit checklist.