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  • IEC 62047-10 Ed. 1.0 b:2011

IEC 62047-10 Ed. 1.0 b:2011

Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials

International Electrotechnical Commission , 07/26/2011

Publisher: IEC

File Format: PDF

$25.00$51.00


Standard By:International Electrotechnical Commission , 07/26/2011
Published:07/26/2011
Pages:22
File Size:1 file , 350 KB
Language:English, French
Note:This product is unavailable in Ukraine, Russia, Belarus
IEC 62047-10:2011 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained. This standard is applicable to metallic, ceramic, and polymeric materials.

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