IEC 62047-9 Ed. 1.0 b:2011

Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS

International Electrotechnical Commission , 07/13/2011

Publisher: IEC

File Format: PDF

$95.00$190.00

Description

Standard By:International Electrotechnical Commission , 07/13/2011

Published:07/13/2011

Pages:49

File Size:1 file , 680 KB

Language:English, French

Note:This product is unavailable in Ukraine, Russia, Belarus

IEC 62047-9:2011 describes bonding strength measurement method of wafer to wafer bonding, type of bonding process such as silicon to silicon fusion bonding, silicon to glass anodic bonding, etc., and applicable structure size during MEMS processing/assembly. The applicable wafer thickness is in the range of 10 ohmm to several millimeters.

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