Seminar 24 -- High Intensity to Net-Zero: How High EUI Cleanrooms are Taking on the Net-Zero Challenge

2023 ASHRAE Annual Conference

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Cleanrooms can have an EUI greater than 350 kWh/sq.ft. (3766 kWh/m²). Cleanroom HVAC systems consume up to 80% of the total energy simply to deliver controlled air to critical operations. ISO Standards 14644-4 on Cleanroom Design and 14644-16 on Cleanroom Energy Efficiency have evolved to respond to the changing needs in maintaining ultra-clean environments through energy-efficient contamination control. The standards examine HVAC energy saving and system control optimization. This session covers emerging practices, technologies and applications through introduction of new design/control concepts, case studies to illustrate some key requirements, advancements and applications.